MEGA Kinetics Fluid Systems

MEGA Kinetics Fluid Systems Experts in chemical and slurry blend and delivery for the semiconductor market, including solar, LED

Address

Stafford, OR

Opening Hours

Monday 8am - 5pm
Tuesday 8am - 5pm
Wednesday 8am - 5pm
Thursday 8am - 5pm
Friday 8am - 5pm

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MEGA Kinetics Fluid Systems

Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.

Mega Fluid Systems offers world-class engineering, manufacturing, and testing capabilities. Mega’s partners benefit from high-level customer service and support from our program management, sales, engineering, service, and executive management teams.

Mega is headquartered in Tualatin, Oregon, with sales and engineering offices in Saugerties, NY, Hsinchu, Taiwan, and a strong field service / engineering presence in Chandler, AZ.

Mega Fluid Systems, Inc., is a proud member of SEMI, a global industry association serving the micro- and nano-electronics industries.